From jwc at snf.stanford.edu  Mon Feb  9 12:06:42 2004
From: jwc at snf.stanford.edu (jwc at snf.stanford.edu)
Date: Mon, 9 Feb 2004 12:06:42 -0800
Subject: Problem headway2 2004-02-09 12:06:41: Headway 2 VACUUM IS POOR PLEASE CHK.
Message-ID: <mailman.265.1356281769.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Mon Feb  9 13:38:26 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 9 Feb 2004 13:38:26 -0800
Subject: Problem headway2 2004-02-09 12:06:41: Headway 2 VACUUM IS POOR PLEASE CHK.
Message-ID: <mailman.266.1356281769.3914.headway2-pcs@snf.stanford.edu>

checked vacuum  with  3 different chucks, cycled wafers
no problem found , ok to use. 
please  clean chucks  before you use them