Problem headway2 2004-02-09 12:06:41: Headway 2 VACUUM IS POOR PLEASE CHK.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Feb 9 13:38:26 PST 2004

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checked vacuum  with  3 different chucks, cycled wafers
no problem found , ok to use. 
please  clean chucks  before you use them

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