From mahnaz at snf.stanford.edu  Wed Jan 21 10:24:43 2004
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Wed, 21 Jan 2004 10:24:43 -0800
Subject: Shutdown headway2 2004-01-21 10:24:42: vacume not coming on.
Message-ID: <mailman.263.1356281769.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Wed Jan 21 11:21:25 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 21 Jan 2004 11:21:25 -0800
Subject: Shutdown headway2 2004-01-21 10:24:42: vacume not coming on.
Message-ID: <mailman.264.1356281769.3914.headway2-pcs@snf.stanford.edu>

replaced old vacuum hose, cleaned shaft ,cycled wafers.
Preventive maintenance completed, ok to use.