From crichter at snf.stanford.edu  Tue May 25 18:21:16 2004
From: crichter at snf.stanford.edu (crichter at snf.stanford.edu)
Date: Tue, 25 May 2004 18:21:16 -0700
Subject: Problem headway2 2004-05-25 18:21:15: vacuum does not hold wafer well after spin run
Message-ID: <mailman.269.1356281769.3914.headway2-pcs@snf.stanford.edu>

the vacuum chuck can hold the wafer well at 3500RPM. However, the vacuum closes just before the timer stops and releases the wafer off the chuck each time



From vilanova at snf.stanford.edu  Wed May 26 13:18:35 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 26 May 2004 13:18:35 -0700
Subject: Problem headway2 2004-05-25 18:21:15: vacuum does not hold wafer well after spin run
Message-ID: <mailman.270.1356281769.3914.headway2-pcs@snf.stanford.edu>

We run spinner with all the chucks and we had no  vacuum 
problems,  ok to use.