Problem headway2 2004-05-25 18:21:15: vacuum does not hold wafer well after spin run

crichter at snf.stanford.edu crichter at snf.stanford.edu
Tue May 25 18:21:16 PDT 2004


the vacuum chuck can hold the wafer well at 3500RPM. However, the vacuum closes just before the timer stops and releases the wafer off the chuck each time




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