From bleen at snf.stanford.edu Wed Sep 8 20:48:19 2004 From: bleen at snf.stanford.edu (bleen at snf.stanford.edu) Date: Wed, 8 Sep 2004 20:48:19 -0700 Subject: Problem headway2 SNF 2004-09-08 20:48:19: won't spin up Message-ID: headway won't spin up even with good vacuum. possibly a burnt fuse. Brian From vilanova at snf.stanford.edu Thu Sep 9 07:34:38 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Sep 2004 07:34:38 -0700 Subject: Problem headway2 SNF 2004-09-08 20:48:19: won't spin up Message-ID: Replaced Burned Fuse, cycled wafers, ready to use. From lzhang at snf.stanford.edu Fri Sep 24 17:49:58 2004 From: lzhang at snf.stanford.edu (lzhang at snf.stanford.edu) Date: Fri, 24 Sep 2004 17:49:58 -0700 Subject: Problem headway2 SNF 2004-09-24 17:49:57: Won't spin with small piece chuck Message-ID: The chuck also has vacuum while not spinning. From yyao at snf.stanford.edu Sat Sep 25 12:09:51 2004 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Sat, 25 Sep 2004 12:09:51 -0700 Subject: Problem headway2 SNF 2004-09-25 12:09:50: chuck vacuum always on Message-ID: It is on all the time even the machine is not enabled on coral. Hard to take wafer off after spinning. From vilanova at snf.stanford.edu Mon Sep 27 07:37:23 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Sep 2004 07:37:23 -0700 Subject: Problem headway2 SNF 2004-09-24 17:49:57: Won't spin with small piece chuck Message-ID: cleaned resist from shaft, cycled wafers ok to use. From vilanova at snf.stanford.edu Mon Sep 27 07:38:05 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Sep 2004 07:38:05 -0700 Subject: Problem headway2 SNF 2004-09-25 12:09:50: chuck vacuum always on Message-ID: cleaned Resist from shaft cleaned vacuum lines, cycled wafers, ok to use. :-) From lzhang at snf.stanford.edu Wed Sep 29 13:42:02 2004 From: lzhang at snf.stanford.edu (lzhang at snf.stanford.edu) Date: Wed, 29 Sep 2004 13:42:02 -0700 Subject: Problem headway2 SNF 2004-09-29 13:41:59: Won't spin with samll chuck for pieces Message-ID: From vilanova at snf.stanford.edu Thu Sep 30 08:04:06 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 30 Sep 2004 08:04:06 -0700 Subject: Problem headway2 SNF 2004-09-29 13:41:59: Won't spin with samll chuck for pieces Message-ID: Cleaned resist residues from spindle tube , cycled wafers and wafer pieces working good. Remember that you also have to put the chuck properly and also push it down . :-)