Problem headway2 SNF 2004-09-29 13:41:59: Won't spin with samll chuck for pieces

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Sep 30 08:04:06 PDT 2004


Cleaned resist residues from spindle tube , cycled wafers and wafer pieces working good. Remember that you also have to 
put the chuck properly and also push it down . :-) 




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