From me342c at snf.stanford.edu  Tue Aug  2 11:08:02 2005
From: me342c at snf.stanford.edu (me342c at snf.stanford.edu)
Date: Tue, 2 Aug 2005 11:08:02 -0700
Subject: Problem headway2 SNF 2005-08-02 11:08:01: headway loss of vacuum
Message-ID: <mailman.328.1356281769.3914.headway2-pcs@snf.stanford.edu>

all headway chucks spin without there being a wafer on the chuck.  loss of vacuum results.  i did not cause this problem.



From martinez at snf.stanford.edu  Tue Aug  2 13:26:41 2005
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Tue, 2 Aug 2005 13:26:41 -0700
Subject: Problem headway2 SNF 2005-08-02 11:08:01: headway loss of vacuum
Message-ID: <mailman.329.1356281770.3914.headway2-pcs@snf.stanford.edu>

removed resist from spindle
tested ok



From vilanova at snf.stanford.edu  Wed Aug  3 14:05:02 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 3 Aug 2005 14:05:02 -0700
Subject: Shutdown headway2 SNF 2005-08-03 14:05:02: Monthly maintenance in progress.......
Message-ID: <mailman.330.1356281770.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Wed Aug  3 15:00:42 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 3 Aug 2005 15:00:42 -0700
Subject: Shutdown headway2 SNF 2005-08-03 14:05:02: Monthly maintenance in progress.......
Message-ID: <mailman.331.1356281770.3914.headway2-pcs@snf.stanford.edu>

Monthly PM completed , replaced corroted motor, vacuum hose, Cleaned bench cycled wafers , ready to use. 



From grupp at snf.stanford.edu  Wed Aug  3 17:11:39 2005
From: grupp at snf.stanford.edu (grupp at snf.stanford.edu)
Date: Wed, 3 Aug 2005 17:11:39 -0700
Subject: Shutdown headway2 SNF 2005-08-03 17:11:38: shaft stuck, won't turn
Message-ID: <mailman.332.1356281770.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Thu Aug  4 07:24:07 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 4 Aug 2005 07:24:07 -0700
Subject: Shutdown headway2 SNF 2005-08-03 17:11:38: shaft stuck, won't turn
Message-ID: <mailman.333.1356281770.3914.headway2-pcs@snf.stanford.edu>

replaced burned fuse, cycled wafers ok to use. 



From lxuwind at snf.stanford.edu  Tue Aug 16 22:14:10 2005
From: lxuwind at snf.stanford.edu (lxuwind at snf.stanford.edu)
Date: Tue, 16 Aug 2005 22:14:10 -0700
Subject: Problem headway2 SNF 2005-08-16 22:14:10: wafer flies off when spinning stops
Message-ID: <mailman.334.1356281770.3914.headway2-pcs@snf.stanford.edu>

wafer flies off the holder when the spinning stops. The only way to stop is to first reduce the speed to zero and then step the pedal



From vilanova at snf.stanford.edu  Wed Aug 17 07:19:46 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 17 Aug 2005 07:19:46 -0700
Subject: Problem headway2 SNF 2005-08-16 22:14:10: wafer flies off when spinning stops
Message-ID: <mailman.335.1356281770.3914.headway2-pcs@snf.stanford.edu>

Theres is no problem with the system , the problem is that  
users dont clean the chucks before and after they use them , 
cleaned chucks and cycled wafers , system and chucks are
working Good , ready to use.