Problem headway2 SNF 2005-08-16 22:14:10: wafer flies off when spinning stops

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Aug 17 07:19:46 PDT 2005


Theres is no problem with the system , the problem is that  
users dont clean the chucks before and after they use them , 
cleaned chucks and cycled wafers , system and chucks are
working Good , ready to use. 




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