From jwc at snf.stanford.edu Mon Feb 7 13:25:21 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 7 Feb 2005 13:25:21 -0800 Subject: Problem headway2 SNF 2005-02-07 13:25:13: no proper vacuum sense -- plugged hole? Message-ID: vacuum poor found the hole pl;ugged with red resis need your imm help jwc From vilanova at snf.stanford.edu Mon Feb 7 13:50:55 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 7 Feb 2005 13:50:55 -0800 Subject: Problem headway2 SNF 2005-02-07 13:25:13: no proper vacuum sense -- plugged hole? Message-ID: vacuum ok , adjusted solenoid cycled wafer, ok to use . From jwc at snf.stanford.edu Wed Feb 9 12:16:32 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 9 Feb 2005 12:16:32 -0800 Subject: Comment headway2 SNF 2005-02-09 12:16:31: Red resist all over becnh and shields Message-ID: Today found red resist presumably LOL all over the 100 mm chuck and across the bench top and shields above this bench. Wiped down bench with lint free soaked in acetone but further work will be needed to completely clean this area. From vilanova at snf.stanford.edu Thu Feb 10 09:31:17 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 10 Feb 2005 09:31:17 -0800 Subject: Shutdown headway2 SNF 2005-02-10 09:31:17: Weekly Maintenance in progress....... Message-ID: Weekly Maintenance In progress..................... From vilanova at snf.stanford.edu Thu Feb 10 10:37:02 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 10 Feb 2005 10:37:02 -0800 Subject: Shutdown headway2 SNF 2005-02-10 09:31:17: Weekly Maintenance in progress....... Message-ID: Weekly Maintenance Completed, cycled wafers ( I also cleaned up wetbench) , ok to use From vilanova at snf.stanford.edu Fri Feb 18 13:51:37 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 13:51:37 -0800 Subject: Comment headway2 SNF 2005-02-09 12:16:31: Red resist all over becnh and shields Message-ID: cleared comment.