Problem headway2 SNF 2005-07-17 14:05:42: Vacuum down

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Jul 18 08:01:48 PDT 2005


Cleaned, adjusted and removed 
excesive amount of resist from 
 Vacuum hose  and spindle tube,  Cycled wafers , ready to use




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