From vilanova at snf.stanford.edu  Tue Jun  7 09:06:51 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 7 Jun 2005 09:06:51 -0700
Subject: Shutdown headway2 SNF 2005-06-07 09:06:47: MOnthly Maintenance in progress.........
Message-ID: <mailman.314.1356281769.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Jun  7 10:12:20 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 7 Jun 2005 10:12:20 -0700
Subject: Comment headway2 SNF 2005-04-05 10:52:39: Monthly Preventive maintenance
Message-ID: <mailman.315.1356281769.3914.headway2-pcs@snf.stanford.edu>

MOnthly preventive maintenance completed, ok to use.
I also found the small white  teflon chuck  that was missing for
several months. 



From vilanova at snf.stanford.edu  Tue Jun  7 10:13:08 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 7 Jun 2005 10:13:08 -0700
Subject: Comment headway2 SNF 2005-05-03 10:28:29: Monthly Pm Completed. 
Message-ID: <mailman.316.1356281769.3914.headway2-pcs@snf.stanford.edu>

Monthly Pm completed, I also found the missing white teflon 
chuck that was missing for a few months. ok to use. 



From vilanova at snf.stanford.edu  Tue Jun  7 10:15:03 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 7 Jun 2005 10:15:03 -0700
Subject: Shutdown headway2 SNF 2005-06-07 09:06:47: MOnthly Maintenance in progress.........
Message-ID: <mailman.317.1356281769.3914.headway2-pcs@snf.stanford.edu>

Monthly PM completed , ok to use. 
I also FOund the missing chuck (Small  white teflon for pieces )  



From vilanova at snf.stanford.edu  Wed Jun 22 13:58:56 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 22 Jun 2005 13:58:56 -0700
Subject: Shutdown headway2 SNF 2005-06-22 13:58:32: weekly maintenance
Message-ID: <mailman.318.1356281769.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Wed Jun 22 15:00:13 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 22 Jun 2005 15:00:13 -0700
Subject: Shutdown headway2 SNF 2005-06-22 13:58:32: weekly maintenance
Message-ID: <mailman.319.1356281769.3914.headway2-pcs@snf.stanford.edu>

Weekly Pm Completed., CYcled wafers ,  ok to use



From me342b at snf.stanford.edu  Wed Jun 29 11:55:44 2005
From: me342b at snf.stanford.edu (me342b at snf.stanford.edu)
Date: Wed, 29 Jun 2005 11:55:44 -0700
Subject: Shutdown headway2 SNF 2005-06-29 11:55:40: Spindle is spinning
Message-ID: <mailman.320.1356281769.3914.headway2-pcs@snf.stanford.edu>

During initial check spindle spins.  Even when clean chuck is put on the chuck spins.



From vilanova at snf.stanford.edu  Wed Jun 29 14:12:29 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 29 Jun 2005 14:12:29 -0700
Subject: Shutdown headway2 SNF 2005-06-29 11:55:40: Spindle is spinning
Message-ID: <mailman.321.1356281769.3914.headway2-pcs@snf.stanford.edu>

Checked  and cycled wafers  , I could not repeat the problem , 
Ok to use.