From vilanova at snf.stanford.edu Tue May 3 10:28:30 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 May 2005 10:28:30 -0700 Subject: Comment headway2 SNF 2005-05-03 10:28:29: Monthly Pm Completed. Message-ID: From jwc at snf.stanford.edu Thu May 26 17:32:49 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 26 May 2005 17:32:49 -0700 Subject: Problem headway2 SNF 2005-05-26 17:32:36: RAITH ALERT: Check your exposures for focus!! Message-ID: Greetings Raith Users: Last night on the Electrostatic Chuck and then again today on the Std. Sample Holder I observed much larger than normal offsets from true level during leveling routines. These offsets are on the order of +- 300 um rather than the typical 12 - 28 um for the ESChuck and 28 - 55 um for the Std. Sample Holder. The result of my write last night was very large lines and not all areas cleared, indicating focus was not suitable during the write. Users are encourged to inspect and review their patterns carefully BEFORE pattern transfer. I will look further into this issue in the morning. Has any one else observed this recently, please report to the raith at snf.stanford.edu list. James Conway 05262005:17:32 From vilanova at snf.stanford.edu Fri May 27 06:43:35 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 27 May 2005 06:43:35 -0700 Subject: Problem headway2 SNF 2005-05-26 17:32:36: RAITH ALERT: Check your exposures for focus!! Message-ID: this has nothing to do with Headway, ok to use. this should be under comment not a problem .