From jwc at snf.stanford.edu Tue Oct 4 16:39:32 2005 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 4 Oct 2005 16:39:32 -0700 Subject: Problem headway2 SNF 2005-10-04 16:39:31: wafers are flying off the 100 mm chucks Message-ID: vacuum is poor and 4 of five wafers flew off chuck at end of spin cycle at 4500 rpm jwc From sjo at snf.stanford.edu Wed Oct 5 02:15:46 2005 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Wed, 5 Oct 2005 02:15:46 -0700 Subject: Comment headway2 SNF 2005-10-05 02:15:46: Prevent Wafer Fly-Off as follows Message-ID: Dial speed to zero, put wafer on chuck. Set time to 120 seconds. Hit foot pedal, ramp speed up to desired level, wait for given time, and dial speed back to zero BEFORE timer runs out. The automatic stop is too sudden and causes the wafer to fly off. Manually ramping rotation speed down to zero is much safer. From vilanova at snf.stanford.edu Wed Oct 5 07:53:03 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Oct 2005 07:53:03 -0700 Subject: Problem headway2 SNF 2005-10-04 16:39:31: wafers are flying off the 100 mm chucks Message-ID: Monthly PM Completed, system Working fine, cycled many times and vacuum and everything else works fine, also I brought 2 brand New chucks a 4" and a 3" Please keep them clean . system ready to use. From vilanova at snf.stanford.edu Wed Oct 5 07:53:25 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Oct 2005 07:53:25 -0700 Subject: Comment headway2 SNF 2005-10-05 02:15:46: Prevent Wafer Fly-Off as follows Message-ID: Read previous message. From ianchan at snf.stanford.edu Fri Oct 21 23:32:27 2005 From: ianchan at snf.stanford.edu (ianchan at snf.stanford.edu) Date: Fri, 21 Oct 2005 23:32:27 -0700 Subject: Problem headway2 SNF 2005-10-21 23:32:26: not spinning Message-ID: could not get headway to work at all. Vacuum seems to be good but the motor is not functional. From vilanova at snf.stanford.edu Mon Oct 24 07:59:28 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Oct 2005 07:59:28 -0700 Subject: Problem headway2 SNF 2005-10-21 23:32:26: not spinning Message-ID: Found a burned Fuse In the controller , I guess someone tried to fix it him/herself and use the wrong fuses, PLEASE DO NOT TOUCH OR TRY TO FIX IT YOURSELF!, replaced fuse,cycled wafers , ok to use.