Problem headway2 SNF 2005-10-04 16:39:31: wafers are flying off the 100 mm chucks

jwc at snf.stanford.edu jwc at snf.stanford.edu
Tue Oct 4 16:39:32 PDT 2005


vacuum is poor and 4 of five wafers flew off chuck at end of spin cycle at 4500 rpm
jwc




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