Comment headway2 SNF 2005-10-05 02:15:46: Prevent Wafer Fly-Off as follows

sjo at snf.stanford.edu sjo at snf.stanford.edu
Wed Oct 5 02:15:46 PDT 2005


Dial speed to zero, put wafer on chuck. Set time to 120 seconds.  Hit foot pedal, ramp speed up to desired level, wait for given time, and dial speed back to zero BEFORE timer runs out. The automatic stop is too sudden and causes the wafer to fly off. Manually ramping rotation speed down to zero is much safer.




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