Problem headway2 SNF 2005-10-04 16:39:31: wafers are flying off the 100 mm chucks

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Oct 5 07:53:03 PDT 2005


Monthly PM Completed, system Working fine, cycled many
times and vacuum and everything else works fine, also I
brought 2 brand New chucks a 4" and a 3" Please keep them 
clean . system ready to use. 




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