Problem headway2 SNF 2005-10-04 16:39:31: wafers are flying off the 100 mm chucks

[vilanova at snf.stanford.edu]

Monthly PM Completed, system Working fine, cycled many
times and vacuum and everything else works fine, also I
brought 2 brand New chucks a 4" and a 3" Please keep them 
clean . system ready to use.