From jwc at snf.stanford.edu Fri Aug 4 08:35:20 2006 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 04 Aug 2006 08:35:20 -0700 Subject: IMPORTANT: PLEASE be sure to return all ebeam materials to the storage cabinets or refrigerator after you use them. Message-ID: <44D36938.8060006@snf.stanford.edu> Greetings Ebeam and Raith Users Yesterday evening as I finished up my day I found that some unknown User had not returned the 5% 495K PMMA in Anisole to the solvent cabinets where these materials are stored. This prevented at least one user from continuing his work that evening because they could not locate the material. I then found the bottle of ZEP-520A left in the solvent cabinet -- which is not the proper storage location for this material! This material must always be refrigerated and allowed to come up to room temperature before opening the bottle. I wish to know how long the bottle may have been out of the refrigerator to determine if the material has sufficient time to hydrolyze or gelate. This is a very expensive high performance resist material. We all wish to maintain the highest quality in all of our work, so please in the future, be sure to handle and store this material properly. Users preparing substrates with ZEP-520A should carefully determine the dose to clear, inspect all patterns written before attempting pattern transfer, and report your results back to the email lists. Reminder: Please be frugal with the polymer materials you work with at SNF. Your efforts in this regard will assist in controlling expenses for SNF and allow us to continue to offer high quality engineering materials to all Lab Members. Thank you for your interest in Ebeam Technologies at Stanford Nanofabrication Facility! James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: From riteshj at snf.stanford.edu Tue Aug 8 16:34:50 2006 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Tue, 8 Aug 2006 16:34:50 -0700 Subject: Problem headway2 SNF 2006-08-08 16:34:37: the chuck is nto flat Message-ID: the resist runs off to one side wheh the wafer is on the 4 inch chuck From vilanova at snf.stanford.edu Wed Aug 9 07:55:33 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Aug 2006 07:55:33 -0700 Subject: Problem headway2 SNF 2006-08-08 16:34:37: the chuck is nto flat Message-ID: adjusted chuck and tested, ok to use From jwc at snf.stanford.edu Wed Aug 9 13:54:16 2006 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 9 Aug 2006 13:54:16 -0700 Subject: Shutdown headway2 SNF 2006-08-09 13:54:15: vacuum switch not turning off after spins Message-ID: RE: Headway2: vacuum switch is clogged with red resist and intermittantly the vacuum does not turn off. One wafer broken and lost in process. (REF: 02082005_4 SNF NIL stamp layer 1) mario is currently repairing... JWC From vilanova at snf.stanford.edu Wed Aug 9 14:11:51 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Aug 2006 14:11:51 -0700 Subject: Shutdown headway2 SNF 2006-08-09 13:54:15: vacuum switch not turning off after spins Message-ID: monthly Pm completed , cleaned vacuuum solenoid and motor , replaced vacuum hose, tested ok , ready to use. From beinn at snf.stanford.edu Tue Aug 15 09:39:24 2006 From: beinn at snf.stanford.edu (beinn at snf.stanford.edu) Date: Tue, 15 Aug 2006 09:39:24 -0700 Subject: Problem headway2 SNF 2006-08-15 09:39:22: Chuck not level Message-ID: Wafer on chuck tends to slope towards the back From vilanova at snf.stanford.edu Tue Aug 15 11:07:25 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Aug 2006 11:07:25 -0700 Subject: Problem headway2 SNF 2006-08-15 09:39:22: Chuck not level Message-ID: adjusted chuck level , ok to use. From beinn at snf.stanford.edu Fri Aug 25 15:17:15 2006 From: beinn at snf.stanford.edu (beinn at snf.stanford.edu) Date: Fri, 25 Aug 2006 15:17:15 -0700 Subject: Comment headway2 SNF 2006-08-25 15:17:14: Chuck tilting slighly to back Message-ID: