Shutdown headway2 SNF 2006-08-09 13:54:15: vacuum switch not turning off after spins

jwc at snf.stanford.edu jwc at snf.stanford.edu
Wed Aug 9 13:54:16 PDT 2006

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RE: Headway2:
vacuum switch is clogged with red resist and intermittantly the vacuum does not turn off.  One wafer broken and lost in process. (REF: 02082005_4 SNF NIL stamp layer 1) 
mario is currently repairing...
JWC

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