From mahnaz at snf.stanford.edu  Thu Jan  5 10:21:52 2006
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 5 Jan 2006 10:21:52 -0800
Subject: Problem headway2 SNF 2006-01-05 10:21:51: timer is not timing correctly
Message-ID: <mailman.350.1356281770.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Thu Jan  5 10:41:36 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 5 Jan 2006 10:41:36 -0800
Subject: Problem headway2 SNF 2006-01-05 10:21:51: timer is not timing correctly
Message-ID: <mailman.351.1356281770.3914.headway2-pcs@snf.stanford.edu>

Timer has been adjusted , ok to use. 



From bobliu at snf.stanford.edu  Wed Jan 11 11:48:21 2006
From: bobliu at snf.stanford.edu (bobliu at snf.stanford.edu)
Date: Wed, 11 Jan 2006 11:48:21 -0800
Subject: Problem headway2 SNF 2006-01-11 11:48:21: Noisy and release wafer before spinning stops
Message-ID: <mailman.352.1356281770.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Wed Jan 11 13:59:50 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 11 Jan 2006 13:59:50 -0800
Subject: Problem headway2 SNF 2006-01-11 11:48:21: Noisy and release wafer before spinning stops
Message-ID: <mailman.353.1356281770.3914.headway2-pcs@snf.stanford.edu>

There was nothing with the system , User was trying  to use 
a chuck with no O-ring , Replaced Oring cycled wafers , 
ready to use. 



From crichter at snf.stanford.edu  Thu Jan 12 15:03:55 2006
From: crichter at snf.stanford.edu (crichter at snf.stanford.edu)
Date: Thu, 12 Jan 2006 15:03:55 -0800
Subject: Problem headway2 SNF 2006-01-12 15:03:52: vacuum not holding wafers or pieces beyond ~5000RPM
Message-ID: <mailman.354.1356281770.3914.headway2-pcs@snf.stanford.edu>

pieces or wafers fly off or fly off after the chuck stops



From martinez at snf.stanford.edu  Thu Jan 12 15:51:04 2006
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Thu, 12 Jan 2006 15:51:04 -0800
Subject: Problem headway2 SNF 2006-01-12 15:03:52: vacuum not holding wafers or pieces beyond ~5000RPM
Message-ID: <mailman.355.1356281770.3914.headway2-pcs@snf.stanford.edu>

cleaned resist from chuck, spindle
cycled wafer at 5krpm
no problem found



From mahnaz at snf.stanford.edu  Thu Jan 19 11:01:24 2006
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 19 Jan 2006 11:01:24 -0800
Subject: Problem headway2 SNF 2006-01-19 11:01:23: vacume not good , wafer slid off the chuck.
Message-ID: <mailman.356.1356281770.3914.headway2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Thu Jan 19 11:17:51 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 19 Jan 2006 11:17:51 -0800
Subject: Problem headway2 SNF 2006-01-19 11:01:23: vacume not good , wafer slid off the chuck.
Message-ID: <mailman.357.1356281770.3914.headway2-pcs@snf.stanford.edu>

Vacuum is good, the surface on one of the 4" chucks was dirty , Cleaned Chuck, cycled wafer, Ok to use.