Problem headway2 SNF 2006-01-11 11:48:21: Noisy and release wafer before spinning stops

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Jan 11 13:59:50 PST 2006


There was nothing with the system , User was trying  to use 
a chuck with no O-ring , Replaced Oring cycled wafers , 
ready to use. 




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