Problem headway2 SNF 2006-01-19 11:01:23: vacume not good , wafer slid off the chuck.
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Thu Jan 19 11:01:24 PST 2006
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Problem headway2 SNF 2006-01-12 15:03:52: vacuum not holding wafers or pieces beyond ~5000RPM
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Problem headway2 SNF 2006-01-19 11:01:23: vacume not good , wafer slid off the chuck.
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Problem headway2 SNF 2006-01-12 15:03:52: vacuum not holding wafers or pieces beyond ~5000RPM
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Problem headway2 SNF 2006-01-19 11:01:23: vacume not good , wafer slid off the chuck.
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