Problem headway2 SNF 2006-01-19 11:01:23: vacume not good , wafer slid off the chuck.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jan 19 11:17:51 PST 2006


Vacuum is good, the surface on one of the 4" chucks was dirty , Cleaned Chuck, cycled wafer, Ok to use. 




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