From riteshj at snf.stanford.edu Tue May 2 17:35:03 2006 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Tue, 2 May 2006 17:35:03 -0700 Subject: Comment headway2 SNF 2006-05-02 17:35:02: alignment is slightly off Message-ID: Resist starts running off the wafer towards one side. (4" wafer) From vilanova at snf.stanford.edu Wed May 3 07:05:59 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 May 2006 07:05:59 -0700 Subject: Comment headway2 SNF 2006-05-02 17:35:02: alignment is slightly off Message-ID: Adjusted and Aligned Motor shaft , Ready to use. From closega at snf.stanford.edu Wed May 10 16:55:58 2006 From: closega at snf.stanford.edu (closega at snf.stanford.edu) Date: Wed, 10 May 2006 16:55:58 -0700 Subject: Problem headway2 SNF 2006-05-10 16:55:58: Vacuum unable to hold wafer at 8000rpm Message-ID: May work at lower spin speed. From jwc at snf.stanford.edu Wed May 10 17:22:07 2006 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 10 May 2006 17:22:07 -0700 Subject: Problem headway2 SNF 2006-05-10 16:55:58: Vacuum unable to hold wafer at 8000rpm Message-ID: <446283AF.4040207@snf.stanford.edu> This has been a problem intermittently for some time. Could we please consider installing and accumulator tank in line with the vacuum? This would give us much better and more consistent vacuum. It would be less likely to fling wafers off the chucks if the vacuum was sufficient. Thank you, JWC closega at snf.stanford.edu wrote: >May work at lower spin speed. > > From vilanova at snf.stanford.edu Thu May 11 10:20:07 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 May 2006 10:20:07 -0700 Subject: Problem headway2 SNF 2006-05-10 16:55:58: Vacuum unable to hold wafer at 8000rpm Message-ID: Removed Excess Resist from Shaft , Replaced Vacuum Hose, Removed a piece of alumminum foil from shaft, cycled wafer 850RPM , Vacuum Working Good, ready to use.