From closega at snf.stanford.edu Wed Nov 1 16:54:49 2006 From: closega at snf.stanford.edu (closega at snf.stanford.edu) Date: Wed, 1 Nov 2006 16:54:49 -0800 Subject: Problem headway2 SNF 2006-11-01 16:54:45: chick does not come off Message-ID: From vilanova at snf.stanford.edu Thu Nov 2 08:03:40 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 2 Nov 2006 08:03:40 -0800 Subject: Problem headway2 SNF 2006-11-01 16:54:45: chick does not come off Message-ID: removed chuck checked system, ran wafer . ok to use. From zhangy at snf.stanford.edu Sun Nov 5 18:48:51 2006 From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu) Date: Sun, 5 Nov 2006 18:48:51 -0800 Subject: Problem headway2 SNF 2006-11-05 18:48:50: The holder could not spin Message-ID: From vilanova at snf.stanford.edu Mon Nov 6 08:04:42 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 08:04:42 -0800 Subject: Problem headway2 SNF 2006-11-05 18:48:50: The holder could not spin Message-ID: Cycled Wafer, System Working Fine , ok to use. From crichter at snf.stanford.edu Tue Nov 7 14:03:18 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 7 Nov 2006 14:03:18 -0800 Subject: Shutdown headway2 SNF 2006-11-07 14:03:17: Spindle Frozen Message-ID: Spindle is very stiff. It will not work at any RPM setting. From cbaxter at snf.stanford.edu Tue Nov 7 14:15:35 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 7 Nov 2006 14:15:35 -0800 Subject: Shutdown headway2 SNF 2006-11-07 14:03:17: Spindle Frozen Message-ID: Cleaned spindle with acetone. From xiaowei at snf.stanford.edu Tue Nov 7 18:15:51 2006 From: xiaowei at snf.stanford.edu (xiaowei at snf.stanford.edu) Date: Tue, 7 Nov 2006 18:15:51 -0800 Subject: Shutdown headway2 SNF 2006-11-07 18:15:50: spindle is not working Message-ID: vacuum is good, but spindle is not working. Another user told me same thing happened this morning and later was fixed. But now it happened again... From vilanova at snf.stanford.edu Wed Nov 8 09:48:43 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Nov 2006 09:48:43 -0800 Subject: Shutdown headway2 SNF 2006-11-07 18:15:50: spindle is not working Message-ID: replaced Burned fuses , Cycled wafer , ok to use. From angiel at snf.stanford.edu Mon Nov 27 17:43:42 2006 From: angiel at snf.stanford.edu (angiel at snf.stanford.edu) Date: Mon, 27 Nov 2006 17:43:42 -0800 Subject: Problem headway2 SNF 2006-11-27 17:43:41: vacuum problem? Message-ID: Seems there might be a problem with holding the vacuum. Tried several different chucks and wafers kept flying off. From vilanova at snf.stanford.edu Tue Nov 28 07:52:51 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Nov 2006 07:52:51 -0800 Subject: Problem headway2 SNF 2006-11-27 17:43:41: vacuum problem? Message-ID: the problem is not the vacuum , the problem is the chucks people dont clean or set the chucks properly , if the wafer is not flat the wafer will not stay in place, I.m cleaning 3 of the chucks ) THE OTHER ONES ARE WORKING FINE ) and I will test them later.