Problem headway2 SNF 2006-11-27 17:43:41: vacuum problem?

[vilanova at snf.stanford.edu]

the problem is not the vacuum , the problem is the chucks
people dont clean or set the chucks properly , if the wafer is
not flat the wafer will not stay in  place, I.m cleaning 3 of the
chucks ) THE OTHER ONES ARE WORKING FINE ) and I 
will test them later.