Problem headway2 SNF 2006-11-27 17:43:41: vacuum problem?

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Nov 28 07:52:51 PST 2006


the problem is not the vacuum , the problem is the chucks
people dont clean or set the chucks properly , if the wafer is
not flat the wafer will not stay in  place, I.m cleaning 3 of the
chucks ) THE OTHER ONES ARE WORKING FINE ) and I 
will test them later. 




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