From johnpaul at snf.stanford.edu Sat Sep 2 18:45:18 2006 From: johnpaul at snf.stanford.edu (johnpaul at snf.stanford.edu) Date: Sat, 2 Sep 2006 18:45:18 -0700 Subject: Problem headway2 SNF 2006-09-02 18:45:17: Will not spin Message-ID: When I arrived, it was stuck (probably with resist) and would not spin at all. After cleaning around it with a wipe with IPA, it was able to at least rotate freely when turned off. But still it will not spin with the pedal depressed. From vilanova at snf.stanford.edu Tue Sep 5 08:11:56 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 5 Sep 2006 08:11:56 -0700 Subject: Problem headway2 SNF 2006-09-02 18:45:17: Will not spin Message-ID: replaced burned out fuse, Tested ok, good to use. From crichter at snf.stanford.edu Wed Sep 27 11:31:55 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Wed, 27 Sep 2006 11:31:55 -0700 Subject: Problem headway2 SNF 2006-09-27 11:31:54: there is still vacuum holding the wafer after spin coating Message-ID: I can get the wafer off the chuck if I remove both the chuck and wafer. From vilanova at snf.stanford.edu Wed Sep 27 13:52:40 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 27 Sep 2006 13:52:40 -0700 Subject: Problem headway2 SNF 2006-09-27 11:31:54: there is still vacuum holding the wafer after spin coating Message-ID: cleaned Solenoid Valve and spindle tube, tested , ready to use.