From vilanova at snf.stanford.edu Wed Aug 1 07:26:00 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 1 Aug 2007 07:26:00 -0700 Subject: Problem headway2 SNF 2007-07-31 11:48:25: spinner/chuck not level Message-ID: checked system level , Level was right on the center the problem is the chucks , If the chuck is not inserted properly it will not be center and also the system will not hold Good vacuum . Please Insert the chuck the proper way, we are cleaning a few of them right now, I also cleaned the bench it was full of resist residues Please Use the plastic cover ( to cover the system while running ) So you will not get any splash On the wall bench and also On you. Good to use. From vilanova at snf.stanford.edu Wed Aug 1 07:26:35 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 1 Aug 2007 07:26:35 -0700 Subject: Problem headway2 SNF 2007-07-31 12:31:46: no photocassettes availabke for users!!! Message-ID: this should be a comment not a problem for headway spinner. From vilanova at snf.stanford.edu Wed Aug 1 11:29:38 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 1 Aug 2007 11:29:38 -0700 Subject: Comment headway2 SNF 2007-08-01 11:29:38: Clean chucks Message-ID: I Just Finished Cleaning all the chucks ( 4" ) I replaced all the O-rings ( bottom and Top ). From haniff at snf.stanford.edu Wed Aug 8 10:09:11 2007 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Wed, 8 Aug 2007 10:09:11 -0700 Subject: Shutdown headway2 SNF 2007-08-08 10:09:10: level problem Message-ID: From vilanova at snf.stanford.edu Wed Aug 8 10:32:46 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Aug 2007 10:32:46 -0700 Subject: Shutdown headway2 SNF 2007-08-08 10:09:10: level problem Message-ID: leveled motor , tested with user wafers ( hes happy) everything looks good, ok to use. From razevedo at snf.stanford.edu Mon Aug 20 09:08:28 2007 From: razevedo at snf.stanford.edu (razevedo at snf.stanford.edu) Date: Mon, 20 Aug 2007 09:08:28 -0700 Subject: Comment headway2 SNF 2007-08-20 09:08:28: countertop dirty Message-ID: many resist spots. Cleaned up with a wipe. Users should put foil down under their work area. From jparker at snf.stanford.edu Fri Aug 24 10:33:29 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Fri, 24 Aug 2007 10:33:29 -0700 Subject: Comment headway2 SNF 2007-08-24 10:33:28: Freeing up middle of my 8/24 reservation Message-ID: Equipment for process step immediately following headway coating needs maintanence. Leaving headway free from 10:30 to 11:30 as a result. Planning on returning to headway for rest of reservation from 11:30-1:00 if maintenance goes as planned.