From gth at snf.stanford.edu Sun Feb 4 15:52:30 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sun, 4 Feb 2007 15:52:30 -0800 Subject: Comment headway2 SNF 2007-02-04 15:52:30: cassetes dirty Message-ID: most of the wafer cassetes on top of headway are dirty with PR. please let me know how to clean them for future use. thanks -gaurav gth at snf.stanford.edu From jwc at snf.stanford.edu Mon Feb 12 11:51:26 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 12 Feb 2007 11:51:26 -0800 Subject: Problem headway2 SNF 2007-02-12 11:51:25: insufficient vacuum to secure wafer Message-ID: cleaned and tested the 100 mm wafer chucks and there is insufficient vacuum to secure wafer to tthe spinner chuck. also need some O-RINGS for these chucks. Three man hours lost time for users. JWC From gth at snf.stanford.edu Mon Feb 12 11:52:00 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 12 Feb 2007 11:52:00 -0800 Subject: Problem headway2 SNF 2007-02-12 11:52:00: o-rings and tack vac Message-ID: hi we are not able to spin the 4 inch wafers, tack vac is bad and unable to find spare o-rings thanks -gaurav From vilanova at snf.stanford.edu Mon Feb 12 13:41:05 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Feb 2007 13:41:05 -0800 Subject: Problem headway2 SNF 2007-02-12 11:51:25: insufficient vacuum to secure wafer Message-ID: no vacuum problem at all , maybe they were not using the proper chuck , checked system chucks and theyre working fine, I left some extra o rings in the chuck box. From vilanova at snf.stanford.edu Mon Feb 12 13:41:24 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Feb 2007 13:41:24 -0800 Subject: Problem headway2 SNF 2007-02-12 11:52:00: o-rings and tack vac Message-ID: Read previous message.