Problem headway2 SNF 2007-07-31 11:48:25: spinner/chuck not level

James Conway jwc at snf.stanford.edu
Tue Jul 31 13:09:53 PDT 2007


Spinner chucks are very contaminated.

Stripping and cleaning in the resist hot pot used for the spinner bowls

I will retrieve later this afternoon...
\
James

haniff at snf.stanford.edu wrote:
> Resist rolls off wafer to the back
>
>   
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