From tdo at snf.stanford.edu Thu Jun 7 17:32:51 2007 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Thu, 7 Jun 2007 17:32:51 -0700 Subject: Problem headway2 SNF 2007-06-07 17:32:51: does not ramp up well Message-ID: cannot ramp up the speed smoothly, goes from 0 to 1000 (or even 3000RPM) abruptly From vilanova at snf.stanford.edu Fri Jun 8 08:50:31 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 Jun 2007 08:50:31 -0700 Subject: Problem headway2 SNF 2007-06-07 17:32:51: does not ramp up well Message-ID: MOnthly Preventive maintenance completed, Cleaned Motor and spindle shaft , replaced vacuum hoses & fittings, Cycled wafers , ok to use. From lwchang at snf.stanford.edu Sat Jun 9 10:57:29 2007 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Sat, 9 Jun 2007 10:57:29 -0700 Subject: Problem headway2 SNF 2007-06-09 10:57:28: vacuum doesn't hold Message-ID: can't spin. vacuum seems to stop in several seconds. From vilanova at snf.stanford.edu Mon Jun 11 07:08:24 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Jun 2007 07:08:24 -0700 Subject: Problem headway2 SNF 2007-06-09 10:57:28: vacuum doesn't hold Message-ID: vacuum doesnt work properly when the insert chuck o ring is full of resist , cleaned chucks , cycled wafers, system working Good, ok to use.