Problem headway2 SNF 2007-06-07 17:32:51: does not ramp up well

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jun 8 08:50:31 PDT 2007


MOnthly Preventive maintenance completed, Cleaned Motor
and spindle shaft , replaced vacuum hoses & fittings, 
Cycled wafers , ok to use. 




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