Problem headway2 SNF 2007-06-09 10:57:28: vacuum doesn't hold

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Jun 11 07:08:24 PDT 2007


vacuum doesnt work properly when the insert chuck o ring
is full of resist , cleaned chucks , cycled wafers, system 
working Good, ok to use. 




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