Problem headway2 SNF 2007-03-13 13:19:04:

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Mar 14 14:47:54 PDT 2007


The system is back on , I replaced the defective motor, cleaned all the vacuum lines checked Controller boards and replaced
burned out fuses, PLEASE DO NOT USE ACETONE INSIDE
THE SPINDLE! I found a lot of resist and acetone  all over the 
connectors and wires it was hard to bring it alive because of the excess of resist that build up all over the motor assembly.
Cycled wafers , ok to use. 




More information about the headway2-pcs mailing list