Problem headway2 SNF 2007-11-12 09:50:38: headway may need cleaning

crichter at snf.stanford.edu crichter at snf.stanford.edu
Mon Nov 12 09:50:39 PST 2007


The spindle is spinning the chuck without any wafer on top. I noticed that the spindle has resist inside. It may cause wafers to fly off later on.




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