From jwc at snf.stanford.edu Tue Apr 8 11:25:53 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 8 Apr 2008 11:25:53 -0700 Subject: Comment headway2 SNF 2008-04-08 11:25:51: mario saves the day deserves special prize! Message-ID: PREVIOUS USERS CLOGGED UP THE SPINDLE WITH RESIST. MARIO CLEASNED UP THE CLOG AND RETURNED THE SYSTEM TO SERVICE. WHAT WOULD WE DO WITHOUT MARIO! JWC From jwc at snf.stanford.edu Wed Apr 9 17:28:22 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 9 Apr 2008 17:28:22 -0700 Subject: Comment headway2 SNF 2008-04-09 17:28:21: LOL OR RED RESIST FOUND ALL OVER DECK AND WALLS OF RHS OF BENCH Message-ID: USERS: USERS ARE ADVISED TO ENSURE THAT THEY CLEAN UP AFTER THEIR SPINNING TASK ON HEADWAY. THIS AFTERNOON LOL OR RED RESIST WAS FOUND ALL OVER DECK AND WALLS OF RHS OF BENCH WBMISCRES. PREVIOIUS USER DID NOT REPORT THIS ON CORAL, SO PRESUMABLY THIS MESS WAS LEFT BY RCORDOVA. I JUST CLEANED AND STRIPPED THIS BENCH YESTERDAY EVENING MYSELF. JWC From rcordova at snf.stanford.edu Thu Apr 10 10:12:24 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 10 Apr 2008 10:12:24 -0700 Subject: Comment headway2 SNF 2008-04-10 10:12:24: LOL NOT used Message-ID: Sorry if there was LOL resist on this system, I do not use LOL and my polyimide that I used, is used with the cover in place. Maintenance was observing while I used yesterday, and can confirm . regards, Rcordova From mislam at snf.stanford.edu Mon Apr 21 22:13:34 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 21 Apr 2008 22:13:34 -0700 Subject: Shutdown headway2 SNF 2008-04-21 22:13:34: Wafer stuck on chuck, vacuum not releasing Message-ID: vacuum is always on, valve stuck open? wafer substrate is very fragile (250um), breaks easily. I would like to save my wafer if possible. From vilanova at snf.stanford.edu Tue Apr 22 07:56:53 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 22 Apr 2008 07:56:53 -0700 Subject: Shutdown headway2 SNF 2008-04-21 22:13:34: Wafer stuck on chuck, vacuum not releasing Message-ID: Disconnected Main Vacuum, Saved User Wafer, Cleaned shaft and cleaned & remove excess resist from solenoid, Cleaned system bowl replaced Aluminum Foil, tested, OK TO USE.