Shutdown headway2 SNF 2008-04-21 22:13:34: Wafer stuck on chuck, vacuum not releasing

mislam at snf.stanford.edu mislam at snf.stanford.edu
Mon Apr 21 22:13:34 PDT 2008


vacuum is always on, valve stuck open? wafer substrate is very fragile (250um), breaks easily. I would like to save my wafer if possible.




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