Shutdown headway2 SNF 2008-04-21 22:13:34: Wafer stuck on chuck, vacuum not releasing

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Apr 22 07:56:53 PDT 2008


Disconnected Main Vacuum, Saved User Wafer, Cleaned shaft
and cleaned & remove excess resist from  solenoid,
Cleaned system bowl replaced Aluminum Foil, tested, 
OK TO USE.




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