From mtang at snf.stanford.edu Mon Dec 1 16:08:26 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 1 Dec 2008 16:08:26 -0800 Subject: Comment headway2 SNF 2008-12-01 16:08:25: LOL2000 Update Message-ID: Our order of LOL 2000 is due to arrive in a few days. In the meantime, UCSB is saving the day and is FedEx'ing a couple hundred milliliters to tide us through. This should arrive tomorrow afternoon. From kcbalram at snf.stanford.edu Tue Dec 2 16:36:28 2008 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Tue, 2 Dec 2008 16:36:28 -0800 Subject: Problem headway2 SNF 2008-12-02 16:36:27: Chuck Vacuum problem Message-ID: vacuum check failed From vilanova at snf.stanford.edu Wed Dec 3 08:10:02 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 Dec 2008 08:10:02 -0800 Subject: Problem headway2 SNF 2008-12-02 16:36:27: Chuck Vacuum problem Message-ID: removed dry chuncks of resist from the spindle shaft , cleaned vacuum hoses, fittings ,solenoid and bench , tested ok to use. From mahnaz at stanford.edu Wed Dec 3 12:03:02 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 03 Dec 2008 12:03:02 -0800 Subject: RESERVATION Message-ID: <4936E5F6.9080402@stanford.edu> Hello all Please adjust your reservation to two hours immediately. Usually this is not an issue but it seems that it has become so I would appreciate if you be kind and considered of your fellow labmembers. LIMIT IT to two hours or less please. I am not sure in any event any one would really need two hours. mahnaz From mahnaz at stanford.edu Fri Dec 5 10:44:35 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 05 Dec 2008 10:44:35 -0800 Subject: LOL2000 Message-ID: <49397693.5050303@stanford.edu> Hello all, Our supply of the LOL2000 will be here on Monday 8th. Please make the little bottle we have last and use it in a fashion so every one gets a chance to do their work. If you have many wafers to do, we would appreciate if you wait till Monday. Sorry for the inconvenient and I do appreciate your help in this matter. Mahnaz From mahnaz at stanford.edu Mon Dec 8 16:57:48 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 08 Dec 2008 16:57:48 -0800 Subject: LOL2000 Message-ID: <493DC28C.1020203@stanford.edu> Hello all, The new supply of the LOL arrived and a new bottle is in small yellow cabinet next to headway. happy processing mahnaz From jwc at snf.stanford.edu Tue Dec 9 11:34:56 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 9 Dec 2008 11:34:56 -0800 Subject: Shutdown headway2 SNF 2008-12-09 11:34:56: Spindle frozen by SU-8 or an cyanacrylate Message-ID: Spindle frozen by SU-8 or an cyanacrylate couldn't complete the training for user on this tool From vilanova at snf.stanford.edu Tue Dec 9 13:51:41 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Dec 2008 13:51:41 -0800 Subject: Shutdown headway2 SNF 2008-12-09 11:34:56: Spindle frozen by SU-8 or an cyanacrylate Message-ID: cleaned spindle and solenoid, removed big chunck of resist from vacuum line, tested, ready to use. From jwc at snf.stanford.edu Tue Dec 9 15:23:27 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 9 Dec 2008 15:23:27 -0800 Subject: Comment headway2 SNF 2008-12-09 15:23:26: headway working great clean and level! Message-ID: Thank you Mario for the rapid response to our repair request! From bryane at snf.stanford.edu Wed Dec 10 13:45:51 2008 From: bryane at snf.stanford.edu (bryane at snf.stanford.edu) Date: Wed, 10 Dec 2008 13:45:51 -0800 Subject: Comment headway2 SNF 2008-12-10 13:45:49: vacuum clogged Message-ID: The Headway spins without a chuck From gsosa at snf.stanford.edu Wed Dec 10 15:27:50 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 10 Dec 2008 15:27:50 -0800 Subject: Comment headway2 SNF 2008-12-10 13:45:49: vacuum clogged Message-ID: Checked and cleaned the spindle tube and vacuum solinoid. From shott at snf.stanford.edu Wed Dec 10 18:22:17 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 10 Dec 2008 18:22:17 -0800 Subject: Comment headway2 SNF 2008-12-10 18:22:17: Planned headway2 upgrades ... Message-ID: This afternoon when Gary was cleaning the clogged spindle on the headway, I spent some time discussing some possible improvements that should make it easier to tell when the system is clogged, make it easier to clean when it becomes clogges, and make it less likely that resist in the system migrates any further than need be. I thought that I'd try to capture some of those suggestions so that we remember the full list. Possible improvements include: 1. Replace the 90-degree vacuum elbow underneath the spindle with something like a cross which blank off ports on the bottem side away from the spindle and on the side opposite the vacuum line. When clogged, removing those two caps would make it easier to "rod out" the resist in the spinde. 2. Move the vacuum solenoid into the headcase above the headway rather than in the plenum area. That will decrease the likelihood of resist getting into the spindle. 3. Insert a "liquid trap" in the vacuum line close to the spinner that would trap any resist that gets into that line. These might be similar to the little glass traps in the SVG developers. 4. Insert a vacuum gauge close to the solenoid that could be read in the headcase. This could tell us 3 things: a. Normal vacuum levels of a clean system no resist in the lines when it was running. b. Possible indication of a partially clogged system .... I'm not sure that would be the case, but it might be useful to study. c. Clear indication of a clogged system because it would show vacuum even with no wafer on the chuck. For these latter 2 features to work it would be useful to add a "Vacuum Test" button that would open the vacuum solenoid (but not turn on the spinner) with no vacuum on a chuck. In this case, a clean system would show very little vacuum, a partially clogged system would show a somewhat higher vacuum and a fully clogged system would show a vacuum that was quite high. This "Vacuum Test" button would allow users to determine that t the spindle was clogged before they put their wafers on the chuck which should keep them from having their wafers slide or get thrown off the chuck because there was no vacuum to hold them. Other suggested improvements are, of course, welcome, but Gary is going to begin to acquire these parts in hopes of making some of these change during the shutdown. Thanks, John From raneeyoo at snf.stanford.edu Sat Dec 13 19:57:47 2008 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Sat, 13 Dec 2008 19:57:47 -0800 Subject: Problem headway2 SNF 2008-12-13 19:57:46: chuck does not move Message-ID: The chuck just hold the wafer and did not move at all. I tryied to almost all chucks and turned off and turned on repeatedly. None of them helps. Please help this problem. thanks From shott at snf.stanford.edu Sat Dec 13 21:11:05 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Dec 2008 21:11:05 -0800 Subject: Problem headway2 SNF 2008-12-13 19:57:46: chuck does not move Message-ID: Eric found me and alerted me to this problem. It had blown a fuse .... but the spindle wasn't frozen. So replaced the fuse and we are good to go .... unless what is down there hardens. John' From shott at snf.stanford.edu Sat Dec 13 21:11:23 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Dec 2008 21:11:23 -0800 Subject: Comment headway2 SNF 2008-11-29 13:14:09: No LOL2000 Message-ID: LOL came in ... From shott at snf.stanford.edu Sat Dec 13 21:11:40 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Dec 2008 21:11:40 -0800 Subject: Comment headway2 SNF 2008-12-01 16:08:25: LOL2000 Update Message-ID: LOL arrived ... From shott at snf.stanford.edu Sat Dec 13 21:12:02 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Dec 2008 21:12:02 -0800 Subject: Comment headway2 SNF 2008-12-09 15:23:26: headway working great clean and level! Message-ID: To the archive ...