Problem headway2 SNF 2008-12-02 16:36:27: Chuck Vacuum problem

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Dec 3 08:10:02 PST 2008


removed dry chuncks of resist from the spindle shaft , cleaned 
vacuum hoses, fittings ,solenoid and bench , tested ok to use.




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