Problem headway2 SNF 2008-12-13 19:57:46: chuck does not move

raneeyoo at raneeyoo at
Sat Dec 13 19:57:47 PST 2008

The chuck just hold the wafer and did not move at all.
I tryied to almost all chucks and turned off and turned on repeatedly. None of them helps.
Please help this problem.

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