From gsosa at snf.stanford.edu Fri Feb 1 11:06:38 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 1 Feb 2008 11:06:38 -0800 Subject: Problem headway2 SNF 2008-01-31 14:52:19: Vacuum stuck on Message-ID: Tested spindle vacuum and vacuum sensor. All tested OK. From gsosa at snf.stanford.edu Fri Feb 1 11:07:41 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 1 Feb 2008 11:07:41 -0800 Subject: Comment headway2 SNF 2008-01-31 16:15:33: smells of resist Message-ID: Checked and fixed exhaust to coater bowl. Measured exhaust through bowl- about 225 CFM. From ehe at snf.stanford.edu Sat Feb 9 19:15:29 2008 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 9 Feb 2008 19:15:29 -0800 Subject: Problem headway2 SNF 2008-02-09 19:15:28: motor not working Message-ID: motor stopped working, vacuum ok From zhangy at snf.stanford.edu Sun Feb 10 15:19:13 2008 From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu) Date: Sun, 10 Feb 2008 15:19:13 -0800 Subject: Shutdown headway2 SNF 2008-02-10 15:19:12: motor is not workiing Message-ID: From vilanova at snf.stanford.edu Mon Feb 11 07:32:43 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Feb 2008 07:32:43 -0800 Subject: Shutdown headway2 SNF 2008-02-10 15:19:12: motor is not workiing Message-ID: checked motor, and fuses, I could not find anything wrong with them , I tested the system and is working fine, I,m sure the users enable the system, Ohh well , is working :-) From vilanova at snf.stanford.edu Mon Feb 11 07:32:55 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Feb 2008 07:32:55 -0800 Subject: Problem headway2 SNF 2008-02-09 19:15:28: motor not working Message-ID: checked motor, and fuses, I could not find anything wrong with them , I tested the system and is working fine, I,m sure the users enable the system, Ohh well , is working :-) From bilee at snf.stanford.edu Sun Feb 17 04:17:19 2008 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Sun, 17 Feb 2008 04:17:19 -0800 Subject: Problem headway2 SNF 2008-02-17 04:17:17: Vaccum is not good Message-ID: The chuck spins without a wafer on it. Could not use it. From rmelamud at snf.stanford.edu Sun Feb 17 18:59:50 2008 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Sun, 17 Feb 2008 18:59:50 -0800 Subject: Problem headway2 SNF 2008-02-17 18:59:47: Good to use Message-ID: Headway is functioning. I cleaned the axle using some Acetone. Took a couple of tries, but seems to be working fine now. Please take the time to clean both axle and chuck. In the last couple of days someone used one of my favorite chucks and now it has stuff I can't remove in the vacuum grooves. From vilanova at snf.stanford.edu Tue Feb 19 07:28:14 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 Feb 2008 07:28:14 -0800 Subject: Problem headway2 SNF 2008-02-17 04:17:17: Vaccum is not good Message-ID: Checked Vacuum and spindle looks cleaned and vacuum is working good, Thx Renata, I have to say that Renata is right PLEASE CLEAN THE CHUCK AND SPINDLE AFTER USE. From vilanova at snf.stanford.edu Tue Feb 19 07:28:22 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 Feb 2008 07:28:22 -0800 Subject: Problem headway2 SNF 2008-02-17 18:59:47: Good to use Message-ID: Checked Vacuum and spindle looks cleaned and vacuum is working good, Thx Renata, I have to say that Renata is right PLEASE CLEAN THE CHUCK AND SPINDLE AFTER USE.