From vilanova at snf.stanford.edu Thu Jan 3 14:47:24 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Jan 2008 14:47:24 -0800 Subject: Shutdown headway2 SNF 2007-12-19 07:04:23: Holiday Shutdown.... Message-ID: System back on , tested . From vilanova at snf.stanford.edu Thu Jan 3 14:47:31 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Jan 2008 14:47:31 -0800 Subject: Comment headway2 SNF 2007-12-06 14:06:06: low on the 220-7 Message-ID: System back on , tested . From vilanova at snf.stanford.edu Thu Jan 3 14:47:38 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Jan 2008 14:47:38 -0800 Subject: Comment headway2 SNF 2007-11-19 07:44:20: Removed temp HMDS Bottle Message-ID: System back on , tested . From hktran at snf.stanford.edu Fri Jan 4 07:50:13 2008 From: hktran at snf.stanford.edu (hktran at snf.stanford.edu) Date: Fri, 4 Jan 2008 07:50:13 -0800 Subject: Problem headway2 SNF 2008-01-04 07:50:12: Chuck vac problem Message-ID: Had issue with chuck vac problem. Notified Mario. From vilanova at snf.stanford.edu Mon Jan 7 08:28:32 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 7 Jan 2008 08:28:32 -0800 Subject: Problem headway2 SNF 2008-01-04 07:50:12: Chuck vac problem Message-ID: CHuck vac repaired, cleaned excess of resist from vacuum & spindle parts. From vilanova at snf.stanford.edu Thu Jan 10 13:29:13 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 10 Jan 2008 13:29:13 -0800 Subject: Comment headway2 SNF 2008-01-10 13:29:12: White Delrin Inserts Message-ID: I just FInished replacing All of the CHucks Delrin Inserts. From jwc at snf.stanford.edu Tue Jan 15 11:21:17 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 15 Jan 2008 11:21:17 -0800 Subject: Problem headway2 SNF 2008-01-15 11:21:16: spindle on headway 2 may be clogged... Message-ID: please check the spindle as it may have become clogged with some red resist. spindle turns on test with chuck off. jwc From vilanova at snf.stanford.edu Tue Jan 15 13:57:57 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Jan 2008 13:57:57 -0800 Subject: Problem headway2 SNF 2008-01-15 11:21:16: spindle on headway 2 may be clogged... Message-ID: cleaned resist inside spindle, cycled wafers, Ready to use. From tdo at snf.stanford.edu Wed Jan 16 01:00:20 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Wed, 16 Jan 2008 01:00:20 -0800 Subject: Problem headway2 SNF 2008-01-16 01:00:19: vacuum problem Message-ID: spins without a sample (or even a chuck) on From vilanova at snf.stanford.edu Wed Jan 16 07:24:49 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Jan 2008 07:24:49 -0800 Subject: Problem headway2 SNF 2008-01-16 01:00:19: vacuum problem Message-ID: checked vacuum, everything seems to be normal, I checked the spindle and is not moving or turning without a wafer, we'll keep an eye on it. From mahnaz at snf.stanford.edu Wed Jan 16 10:59:34 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 16 Jan 2008 10:59:34 -0800 Subject: Shutdown headway2 SNF 2008-01-16 10:59:33: spindle is spining Message-ID: Vacume is not coming on From vilanova at snf.stanford.edu Wed Jan 16 13:57:24 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Jan 2008 13:57:24 -0800 Subject: Shutdown headway2 SNF 2008-01-16 10:59:33: spindle is spining Message-ID: the solenoid was stuck because of the excess of polyemide. DO NOT POUR acetone into the spindle because that makes it even worse. From gsosa at snf.stanford.edu Tue Jan 22 10:02:51 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 22 Jan 2008 10:02:51 -0800 Subject: Shutdown headway2 SNF 2008-01-22 10:02:50: Vacuum problem Message-ID: Chuck spins whithout wafer present. From gsosa at snf.stanford.edu Tue Jan 22 12:18:59 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 22 Jan 2008 12:18:59 -0800 Subject: Shutdown headway2 SNF 2008-01-22 10:02:50: Vacuum problem Message-ID: Replaced vacuum solinod plunger and body. Cleaned and cleared blockage of resist in spindle shaft with solid wire rod. and acetone. Checked and adjusted vacuum sensor. User tested OK. From mphillips at snf.stanford.edu Thu Jan 31 14:52:19 2008 From: mphillips at snf.stanford.edu (mphillips at snf.stanford.edu) Date: Thu, 31 Jan 2008 14:52:19 -0800 Subject: Problem headway2 SNF 2008-01-31 14:52:19: Vacuum stuck on Message-ID: The vacuum appears to be stuck on, so centering wafers can be tricky. From shwong at snf.stanford.edu Thu Jan 31 16:15:34 2008 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Thu, 31 Jan 2008 16:15:34 -0800 Subject: Comment headway2 SNF 2008-01-31 16:15:33: smells of resist Message-ID: