Shutdown headway2 SNF 2008-01-22 10:02:50: Vacuum problem
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Tue Jan 22 10:02:51 PST 2008
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Shutdown headway2 SNF 2008-01-16 10:59:33: spindle is spining
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Shutdown headway2 SNF 2008-01-22 10:02:50: Vacuum problem
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Chuck spins whithout wafer present.
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Shutdown headway2 SNF 2008-01-16 10:59:33: spindle is spining
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Shutdown headway2 SNF 2008-01-22 10:02:50: Vacuum problem
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