Shutdown headway2 SNF 2008-06-05 13:48:22: smells and loose the vac.

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Jun 5 15:05:47 PDT 2008


Checked the exhaust at the breathing zone in several places- Looks good at 100 - 130 FPM. Checked exhaust through coater bowl. Also good at +500 FPM. Checked exhaust inside the plenum : 150+ FPM. All looks good. Chuck vacuum OK. Users spinning at > 5000 RPM's (wafers will be thrown off) Users have been advised.




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