From mahnaz at snf.stanford.edu  Wed Mar 12 15:51:24 2008
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Wed, 12 Mar 2008 15:51:24 -0700
Subject: Problem headway2 SNF 2008-03-12 15:51:23: vacume on 
Message-ID: <mailman.492.1356281771.3914.headway2-pcs@snf.stanford.edu>

aall the time per Rosie.
Mario will look in to it.



From vilanova at snf.stanford.edu  Wed Mar 12 15:58:01 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 12 Mar 2008 15:58:01 -0700
Subject: Problem headway2 SNF 2008-03-12 15:51:23: vacume on 
Message-ID: <mailman.493.1356281771.3914.headway2-pcs@snf.stanford.edu>

Cleaned Excess of resist from the chuck and spindle
reaplced Oring, Tested, Good to use. 



From filip at snf.stanford.edu  Wed Mar 12 23:53:35 2008
From: filip at snf.stanford.edu (filip at snf.stanford.edu)
Date: Wed, 12 Mar 2008 23:53:35 -0700
Subject: Comment headway2 SNF 2008-03-12 23:53:35: vacuum issues
Message-ID: <mailman.494.1356281771.3914.headway2-pcs@snf.stanford.edu>

at times, the vacuum is always on, making it difficult to remove wafer from chuck. Rectified itself after 10 mins with help of IPA down the stem.



From vilanova at snf.stanford.edu  Thu Mar 13 07:41:47 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 13 Mar 2008 07:41:47 -0700
Subject: Comment headway2 SNF 2008-03-12 23:53:35: vacuum issues
Message-ID: <mailman.495.1356281771.3914.headway2-pcs@snf.stanford.edu>

MOnthly PM Completed :
Cleaned Spindle and solenoid, replaced vacuum HOses
and fittings. , Ok to use.
PLEASE DO NOT POUR ANY SOLVENTS INTO IT, THAT FIX
THE PROBLEM BUT ONLY FOR A FEW MINUTES, AND IT
PLUG IT EVEN MORE,  JUST WRITE THE PROBLEM ON CORAL.