From vilanova at snf.stanford.edu Thu May 1 11:08:22 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 May 2008 11:08:22 -0700 Subject: Comment headway2 SNF 2008-05-01 11:08:22: cleaned chucks & replaced insert Orings Message-ID: I Cleaned all the chucks ( some of them were full of resist ) and I replaced all of the Insert Small Orings, I also left some in the chuck container in a small zip lock bag , so when the oring gets dirty or old users can replace it. MV From mahnaz at snf.stanford.edu Wed May 7 09:24:35 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 7 May 2008 09:24:35 -0700 Subject: Shutdown headway2 SNF 2008-05-07 09:24:34: loosing vac. Message-ID: and I do not see the shield. Life can be risky in litho area. From vilanova at snf.stanford.edu Wed May 7 09:48:27 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 7 May 2008 09:48:27 -0700 Subject: Shutdown headway2 SNF 2008-05-07 09:24:34: loosing vac. Message-ID: the problem was with the chuck it had some residues of chemical , I cleaned it , and smooth the chuck surface cycled it a few times, good to use. From rcordova at snf.stanford.edu Thu May 8 11:41:30 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 8 May 2008 11:41:30 -0700 Subject: Comment headway2 SNF 2008-05-08 11:41:29: Resisr splatters seen on surface Message-ID: Someone did not clean up their resist splatters, They were dry when I arriived. i showed them to G Sosa, and cleaned up. Please check around after you use!!!!! From krivoire at snf.stanford.edu Thu May 15 22:23:41 2008 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Thu, 15 May 2008 22:23:41 -0700 Subject: Problem headway2 SNF 2008-05-15 22:23:41: vacuum stuck on Message-ID: The chuck is pulling vacuum even when the foot control is not pressed. It's still usable, just a bit hard to position wafer. From vilanova at snf.stanford.edu Fri May 16 08:24:53 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 May 2008 08:24:53 -0700 Subject: Problem headway2 SNF 2008-05-15 22:23:41: vacuum stuck on Message-ID: Monthly Pm Completed , replaced all of the vacuum hoses, fittings, cleaned shaft and solenoid, tested, Good!! Works Like a champ! :-) From jwc at snf.stanford.edu Tue May 20 11:45:37 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 20 May 2008 11:45:37 -0700 Subject: Shutdown headway2 SNF 2008-05-20 11:45:36: Headway 2 spinner will not spin Message-ID: Headway 2 spinner will not spin even though there is good tack vacuum. Likely would work if we didn't have 6 students here this morning. Murphy's Law.... JWC From vilanova at snf.stanford.edu Tue May 20 13:40:20 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 20 May 2008 13:40:20 -0700 Subject: Shutdown headway2 SNF 2008-05-20 11:45:36: Headway 2 spinner will not spin Message-ID: replaced burned fuse, please clean the spindle and chucks after Use Specially after using SU-8 That stuff is sticky and once it gets to the side of the shaft it get stuck to the alumminum FOil and thats why burns the fuses. From ericp at snf.stanford.edu Tue May 20 23:06:32 2008 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Tue, 20 May 2008 23:06:32 -0700 Subject: Problem headway2 SNF 2008-05-20 23:06:31: A New One Message-ID: For the first time I can remember, Headway has NO piece chucks available. I know they are very artistic, but could whomever took them please return them. The main purpose of this tool is for coating PIECES. From bilee at snf.stanford.edu Thu May 22 03:15:13 2008 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Thu, 22 May 2008 03:15:13 -0700 Subject: Problem headway2 SNF 2008-05-22 03:15:11: Does not spin Message-ID: After enabling it, still did not spin at all. From vilanova at snf.stanford.edu Thu May 22 08:20:14 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 22 May 2008 08:20:14 -0700 Subject: Shutdown headway2 SNF 2008-05-22 08:20:14: motor stalled Message-ID: Found Motor Stalled, Also FOund A lot of excess of photoresist all over the shaft and the motor cover plate, since the motor got stalled the fused burned our, i,m working on it to bring it alive, stay tuned............................ From vilanova at snf.stanford.edu Thu May 22 10:57:14 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 22 May 2008 10:57:14 -0700 Subject: Shutdown headway2 SNF 2008-05-22 08:20:14: motor stalled Message-ID: Repairs completed , I ALso cleaned the bench ( there was LOL 2000 All over ) cleaned motor shaft , spindle. cleaned Catch cup Bowl and I put a plastic divider between the shaft and the motor to avoid Liquid Going inside of it, Cycled wafers, Good to use. I,m talking to vendor to see if we can get A couple more small chucks I got one in my office if someone wants to borrow it, stop by my office but after you finish clean it and give it back to me. it stop by From vilanova at snf.stanford.edu Thu May 22 10:57:21 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 22 May 2008 10:57:21 -0700 Subject: Problem headway2 SNF 2008-05-22 03:15:11: Does not spin Message-ID: Repairs completed , I ALso cleaned the bench ( there was LOL 2000 All over ) cleaned motor shaft , spindle. cleaned Catch cup Bowl and I put a plastic divider between the shaft and the motor to avoid Liquid Going inside of it, Cycled wafers, Good to use. I,m talking to vendor to see if we can get A couple more small chucks I got one in my office if someone wants to borrow it, stop by my office but after you finish clean it and give it back to me. it stop by From vilanova at snf.stanford.edu Thu May 22 10:57:30 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 22 May 2008 10:57:30 -0700 Subject: Problem headway2 SNF 2008-05-20 23:06:31: A New One Message-ID: Repairs completed , I ALso cleaned the bench ( there was LOL 2000 All over ) cleaned motor shaft , spindle. cleaned Catch cup Bowl and I put a plastic divider between the shaft and the motor to avoid Liquid Going inside of it, Cycled wafers, Good to use. I,m talking to vendor to see if we can get A couple more small chucks I got one in my office if someone wants to borrow it, stop by my office but after you finish clean it and give it back to me. it stop by From raneeyoo at snf.stanford.edu Fri May 23 16:02:50 2008 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Fri, 23 May 2008 16:02:50 -0700 Subject: Comment headway2 SNF 2008-05-23 16:02:49: missing the smallest sample holder Message-ID: