Shutdown headway2 SNF 2008-05-07 09:24:34: loosing vac.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed May 7 09:48:27 PDT 2008


the problem was with the chuck it had some residues of
chemical , I cleaned it , and smooth the chuck surface
cycled it a few times, good to use. 




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