Shutdown headway2 SNF 2008-11-04 10:57:40: spindle clogged NO VACUUM SUITABLE to TACK A WAFER

jwc at snf.stanford.edu jwc at snf.stanford.edu
Tue Nov 4 10:57:41 PST 2008


This is the third time in a week aI have shut down this system.
We need and accumulation tank on this vacuum line and a waste trap for excess resist so it doesn't clogged the wafer vacuum sense switch.
JWC




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