Problem headway2 SNF 2008-11-04 11:36:09: poor vacuum barely able to hold pieces

jwc at snf.stanford.edu jwc at snf.stanford.edu
Tue Nov 4 11:36:14 PST 2008


I used ~ 15 ml of acetone down the vacuum inlet to clear the clog in the vacuum sense switch.  Vacuum still poor 
previous shut down message:
This is the third time in a week aI have shut down this system.
We need and accumulation tank on this vacuum line and a waste trap for excess resist so it doesn't clogged the wafer vacuum sense switch.
JWC




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